The impact and importance of line width roughness on sub-20nm nanostructures

De Schepper, PeterPeterDe SchepperAltamirano Sanchez, EfrainEfrainAltamirano SanchezVaglio Pret, AlessandroAlessandroVaglio PretBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe Gendt2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20558The impact and importance of line width roughness on sub-20nm nanostructuresMeeting abstract