Contour-based metrology for complex 2D shaped patterns printed by multiple-patterning process

Fuchimoto, DaisukeDaisukeFuchimotoIshimoto, ToruToruIshimotoHiroyuki, ShindoShindoHiroyukiSugahara, HitoshiHitoshiSugaharaToyoda, YasutakaYasutakaToyodaMailfert, JulienJulienMailfertDe Bisschop, PeterPeterDe Bisschop2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23836Contour-based metrology for complex 2D shaped patterns printed by multiple-patterning processProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1859765