Kinetic Monte Carlo simulations of plasma-surface reactions on heterogeneous surfaces

Marinov, DaniilDaniilMarinov2021-10-272021-10-2720192095-0187https://imec-publications.be/handle/20.500.12860/33542Kinetic Monte Carlo simulations of plasma-surface reactions on heterogeneous surfacesJournal articlehttps://doi.org/10.1007/s11705-019-1837-9