Seong, NakNakSeongYeon-Hwa, LimLimYeon-HwaChang-Nam, AhnAhnChang-NamWei-Min, GaoGaoWei-MinJang, DoyoungDoyoungJangRawat, AmitaAmitaRawat2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35923EUV lithography and its enablement of future generations of semiconductor devicesOral presentation