Impact of EUV off-axis illumination on full field imaging performance for NXE:3100

Philipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxPhilippou, AlexanderAlexanderPhilippouKlostermann, UlrichUlrichKlostermannGao, WeiminWeiminGao2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19574Impact of EUV off-axis illumination on full field imaging performance for NXE:3100Proceedings paper