Strahan, Jeffrey R.Jeffrey R.StrahanAdams, Jacob R.Jacob R.AdamsJen, Wei-LunWei-LunJenVanleenhove, AnjaAnjaVanleenhoveNeikirk, Colin C.Colin C.NeikirkRochelle, TimothyTimothyRochelleGronheid, RoelRoelGronheidWillson, C. GrantC. GrantWillson2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16277Fluorinated polymethacrylates as highly sensitive nonchemically amplified e-beam resistsJournal article