Goux, LudovicLudovicGouxParaschiv, VasileVasileParaschivLisoni, JuditJuditLisoniSchwitters, MichaelMichaelSchwittersMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersCasella, P.P.CasellaZambrano, R.R.Zambrano2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10518Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitorsJournal article