Dancila, DragosDragosDancilaEkkels, PhillipPhillipEkkelsSimon, PascalPascalSimonJourdain, AnneAnneJourdainPhommahaxay, AlainAlainPhommahaxayRottenberg, XavierXavierRottenbergHuynen, IsabelleIsabelleHuynenOcket, IljaIljaOcketNauwelaers, BartBartNauwelaersPuers, BobBobPuersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15156A 60GHz silicon micromachined cavity resonator with integrated tuning MEMS arrayProceedings paper