Spampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetDe Simone, DaniloDaniloDe SimonePollentier, IvanIvanPollentierVandenbroeck, NadiaNadiaVandenbroeckPirkl, AlexanderAlexanderPirklKayser, SvenSvenKayserVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34056Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.Oral presentation