Fabrication challenges and opportunities for high-mobility materials: from CMOS applications to emerging derivative technologies

Collaert, NadineNadineCollaertAlian, AliRezaAliRezaAlianDe Jaeger, BriceBriceDe JaegerPeralagu, UthayasankaranUthayasankaranPeralaguVais, AbhitoshAbhitoshVaisWalke, AmeyAmeyWalkeWitters, LiesbethLiesbethWittersYu, HaoHaoYuCapogreco, ElenaElenaCapogrecoDevriendt, KatiaKatiaDevriendtHopf, TobyTobyHopfKenis, KarineKarineKenisMannaert, GeertGeertMannaertMilenin, AlexeyAlexeyMileninPeter, AntonyAntonyPeterSebaai, FaridFaridSebaaiTeugels, LieveLieveTeugelsvan Dorp, DennisDennisvan DorpWostyn, KurtKurtWostynHoriguchi, NaotoNaotoHoriguchiWaldron, NiamhNiamhWaldron2021-10-272021-10-272019-03https://imec-publications.be/handle/20.500.12860/32733Fabrication challenges and opportunities for high-mobility materials: from CMOS applications to emerging derivative technologiesProceedings paperhttps://doi.org/10.1117/12.2511746