From ASML Alpha-demo tool to ASML NXE:3100 at imec - EUV lithography heading towards pre-production mode

Hendrickx, EricEricHendrickxHermans, JanJanHermansLorusso, GianGianLorussoPhilipsen, VickyVickyPhilipsenFoubert, PhilippePhilippeFoubertPollentier, IvanIvanPollentierGoethals, MiekeMiekeGoethalsJonckheere, RikRikJonckheereVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonse2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19061From ASML Alpha-demo tool to ASML NXE:3100 at imec - EUV lithography heading towards pre-production modeProceedings paper