A platform for silicon-on-insulator nanophotonics on industrial CMOS tools

Bogaerts, WimWimBogaertsDumon, PieterPieterDumonFedeli, J.M.J.M.FedeliTchelnokov, A.A.TchelnokovVan Thourhout, DriesDriesVan ThourhoutSelvaraja, ShankarShankarSelvarajaBaets, RoelRoelBaets2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11762A platform for silicon-on-insulator nanophotonics on industrial CMOS toolsOral presentation