Aluminum-induced crystallization of amorphous silicon: influence of materials characteristics on the reaction

Ornaghi, CarloCarloOrnaghiBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmansNijs, JohanJohanNijsMertens, RobertRobertMertens2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9371Aluminum-induced crystallization of amorphous silicon: influence of materials characteristics on the reactionJournal article