Collaborative work on reducing the intersite gaps in outgassing qualification

Inoue, SoichiSoichiInoueShiobara, EishiEishiShiobaraSasami, TakeshiTakeshiSasamiTakagi, IsamuIsamuTakagiKikuchi, YukikoYukikoKikuchiFujimori, ToruToruFujimoriMinegishi, ShinyaShinyaMinegishiBerg, RobertRobertBergLucatorto, ThomasThomasLucatortoHill, ShannonShannonHillTanio, CharlesCharlesTanioPollentier, IvanIvanPollentierLin, Yen-ChihYen-ChihLinFan, Yu-JenYu-JenFanAshworth, DominicDominicAshworth2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25417Collaborative work on reducing the intersite gaps in outgassing qualificationProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2207813