A versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation loss

Helin, PhilippePhilippeHelinFirrincieli, AndreaAndreaFirrincieliRay Chaudhuri, AsheshAsheshRay ChaudhuriPham, NgaNgaPhamLenci, SilviaSilviaLenciMannarino, ManuelManuelMannarinoOsman, HarisHarisOsman2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33119A versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation lossProceedings paperhttps://ieeexplore.ieee.org/document/8818059