Sioncke, SonjaSonjaSionckeVanherle, WendyWendyVanherleArt, WimWimArtCeuppens, JorisJorisCeuppensIvanov, TsvetanTsvetanIvanovLin, DennisDennisLinNyns, LauraLauraNynsDelabie, AnneliesAnneliesDelabieConard, ThierryThierryConardStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/23097Si cap passivation for Ge nMOS applicationsJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171300378X