On the nature of weak spots in high-k layers submitted to anneals

Petry, JasmineJasminePetryVandervorst, AlainAlainVandervorstRichard, OlivierOlivierRichardConard, ThierryThierryConardDewolf, P.P.DewolfKaushik, VidyaVidyaKaushikDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan Elshocht2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9419On the nature of weak spots in high-k layers submitted to annealsProceedings paper