Blistering in ALD Al2O3 passivation layers as rear contacting for local Al BSF Si solar cells

Vermang, BartBartVermangGoverde, HansHansGoverdeUruena De Castro, AngelAngelUruena De CastroLorenz, AnneAnneLorenzCornagliotti, EmanueleEmanueleCornagliottiRothschild, AudeAudeRothschildJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-2020120927-0248https://imec-publications.be/handle/20.500.12860/21790Blistering in ALD Al2O3 passivation layers as rear contacting for local Al BSF Si solar cellsJournal article