A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium

Iacopi, FrancescaFrancescaIacopiVereecken, PhilippePhilippeVereeckenSchaekers, MarcMarcSchaekersCaymax, MattyMattyCaymaxDetavernier, ChristopheChristopheDetavernierGriffiths, HefinHefinGriffiths2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12329A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indiumOral presentation