Analysis of Leakage Mechanisms in AlN Nucleation Layers on p-Si and p-SOI Substrates

Zhang, WeihangWeihangZhangSimoen, EddyEddySimoenZhao, MingMingZhaoZhang, J.J.Zhang2021-10-282021-10-2820190018-9383https://imec-publications.be/handle/20.500.12860/34540Analysis of Leakage Mechanisms in AlN Nucleation Layers on p-Si and p-SOI SubstratesJournal articlehttps://ieeexplore.ieee.org/document/8657725