Eslava Fernandez, SalvadorSalvadorEslava FernandezBaklanov, MikhaïlMikhaïlBaklanovIacopi, FrancescaFrancescaIacopiUrrutia, JoneJoneUrrutiaBusawon, Abheesh N.Abheesh N.BusawonKirschhock, Christine E. A.Christine E. A.KirschhockMaex, KarenKarenMaexMartens, Johan A.Johan A.Martens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13699Zeolite-like films for low-k applicationsMeeting abstract