Two- and three-dimensional fully-depleted extension-less devices for advanced logic and memory applications

Veloso, AnabelaAnabelaVelosoDe Keersgieter, AnAnDe KeersgieterAoulaiche, MarcMarcAoulaicheJurczak, GosiaGosiaJurczakThean, AaronAaronTheanHoriguchi, NaotoNaotoHoriguchi2021-10-212021-10-2120130021-4922https://imec-publications.be/handle/20.500.12860/23317Two- and three-dimensional fully-depleted extension-less devices for advanced logic and memory applicationsJournal articlehttp://jjap.jsap.jp/link?JJAP/52/04CC10/