Ablett, JamesJamesAblettWilson, ChrisChrisWilsonPhuong, Nguyen MaiNguyen MaiPhuongKoike, JunichiJunichiKoikeTokei, ZsoltZsoltTokeiSterbinsky, GeorgeGeorgeSterbinskyWoicik, JosephJosephWoicik2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18442Characterization of CVD-Mn barrier layers using X-ray absorption fine structureOral presentation