Thermal oxidation of a densely packed array of vertical Si nanowires

Kurstjens, RufiRufiKurstjensDross, FredericFredericDrossPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17413Thermal oxidation of a densely packed array of vertical Si nanowiresOral presentation