Waeterloos, JoostJoostWaeterloosShaffer, E. O.E. O.ShafferStokich, T.T.StokichHetzner, J.J.HetznerPrice, D.D.PriceBooms, L.L.BoomsDonaton, R. A.R. A.DonatonBeyer, GeraldGeraldBeyerCoenegrachts, BartBartCoenegrachtsCaluwaerts, RudyRudyCaluwaertsStruyf, HerbertHerbertStruyfTokei, ZsoltZsoltTokeiVervoort, IwanIwanVervoortSjjmus, B.B.SjjmusVos, I.I.VosMaex, KarenKarenMaexKomiya, TakayukiTakayukiKomiyaIwashita, J. M.J. M.Iwashita2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5826Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damasceneProceedings paper