Broadband compact single-pole double-throw silicon photonic MEMS switch

Takabayashi, Alain Y.Alain Y.TakabayashiSattari, HamedHamedSattariEdinger, PierrePierreEdingerVerheyen, PeterPeterVerheyenGylfason, Kristinn B.Kristinn B.GylfasonBogaerts, WimWimBogaertsQuack, NielsNielsQuack2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36044Broadband compact single-pole double-throw silicon photonic MEMS switchProceedings paper