Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers

Chen, GuanyuGuanyuChenGoyvaerts, JeroenJeroenGoyvaertsKumari, SulakshnaSulakshnaKumariVan Kerrebrouck, JorisJorisVan KerrebrouckMuneeb, MuhammadMuhammadMuneebUvin, SarahSarahUvinYu, YuYuYuRoelkens, GuntherGuntherRoelkens2021-10-252021-10-252018-031094-4087https://imec-publications.be/handle/20.500.12860/30399Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposersJournal articlehttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-26-5-6351