Martens, KoenKoenMartensSantermans, SybrenSybrenSantermansGupta, MihirMihirGuptaHellings, GeertGeertHellingsWuytens, RobinRobinWuytensDu Bois, BertBertDu BoisDupuy, EmmanuelEmmanuelDupuyAltamirano Sanchez, EfrainEfrainAltamirano SanchezJans, KarolienKarolienJansVos, RitaRitaVosStakenborg, TimTimStakenborgLagae, LiesbetLiesbetLagaeHeyns, MarcMarcHeynsSeveri, SimoneSimoneSeveriVan Roy, WimWimVan Roy2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33553BioFET technology: aggressively scaled pMOS FinFET as biosensorProceedings paper