Diffraction based overlay metrology: accuracy and performance on front end stack

Leray, PhilippePhilippeLerayCheng, ShauneeShauneeChengKandel, DanielDanielKandelAdel, MikeMikeAdelMarchelli, AnatAnatMarchelliVakshtein, IrinaIrinaVakshteinVasconi, MauroMauroVasconiSalski, BartlomiejBartlomiejSalski2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14014Diffraction based overlay metrology: accuracy and performance on front end stackProceedings paper