Structural analysis of epitaxial Si layers grown on porous silicon

Jin, S.S.JinBender, HugoHugoBenderStalmans, LievenLievenStalmansPoortmans, JefJefPoortmansCaymax, MattyMattyCaymax2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3540Structural analysis of epitaxial Si layers grown on porous siliconProceedings paper