Camerotto, ElisabethElisabethCamerottoDe Gendt, StefanStefanDe GendtHauptmann, MarcMarcHauptmannShamiryan, DenisDenisShamiryanHeyns, MarcMarcHeynsMertens, PaulPaulMertensBrems, StevenStevenBrems2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16820The importance of cavitation hysteresis in megasonic cleaningMeeting abstract