SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding

De Witte, HildeHildeDe WitteConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstGijbels, RenaatRenaatGijbels2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4287SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen floodingJournal article