Wada, MasayukiMasayukiWadaGaraud, SylvainSylvainGaraudFerain, IsabelleIsabelleFerainCollaert, NadineNadineCollaertSano, Ken-IchiKen-IchiSanoSnow, JimJimSnowVos, RitaRitaVosLeunissen, PeterPeterLeunissenMertens, PaulPaulMertensEitoku, AAEitoku2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14766Impact of galvanic corrosion on metal gate stacksOral presentation