Evaluation of post metal etch cleaning by analyzing chemical compositions and distributions

Li, H.H.LiBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullartConard, ThierryThierryConardBrijs, BertBertBrijsMaex, KarenKarenMaexFroyen, L.L.Froyen2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2720Evaluation of post metal etch cleaning by analyzing chemical compositions and distributionsOral presentation