Melkonyan, DavitDavitMelkonyanFleischmann, ClaudiaClaudiaFleischmannVeloso, AnabelaAnabelaVelosoFranquet, AlexisAlexisFranquetBogdanowicz, JanuszJanuszBogdanowiczMorris, RichardRichardMorrisVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-2520180304-3991https://imec-publications.be/handle/20.500.12860/31331Wet-chemical etching of atom probe tips for artefact free analyses of nanoscaled semiconductor structuresJournal articlehttps://www.sciencedirect.com/science/article/pii/S0304399117303728