Rothschild, AudeAudeRothschildNishibe, ShinicheShinicheNishibeCui, JianliJianliCuiZhu, NanchangNanchangZhuDebucquoy, MaartenMaartenDebucquoyMamagkakis, StylianosStylianosMamagkakisNagaswami, VenkatVenkatNagaswamiJohn, JoachimJoachimJohn2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19708Surface passivation : layer qualification using QuantoxProceedings paper