Matching performance of FinFET devices with fin widths down to 10nm

Magnone, PaoloPaoloMagnoneMercha, AbdelkarimAbdelkarimMerchaSubramanian, VaidyVaidySubramanianParvais, BertrandBertrandParvaisCollaert, NadineNadineCollaertDehan, MorinMorinDehanDecoutere, StefaanStefaanDecoutereGroeseneken, GuidoGuidoGroesenekenBenson, JimJimBensonMerelle, ThomasThomasMerelleLander, RobRobLanderCrupi, FeliceFeliceCrupiPace, C.C.Pace2021-10-182021-10-1820090741-3106https://imec-publications.be/handle/20.500.12860/15786Matching performance of FinFET devices with fin widths down to 10nmJournal article