Sloyan, KarenKarenSloyanMelkonyan, HenrikHenrikMelkonyanDahlem, MarcusMarcusDahlem2021-11-222021-11-022021-11-2220202374-0140WOS:000612237500148https://imec-publications.be/handle/20.500.12860/38232Fabrication of 2D and 3D Photonic Structures using Focused Ion BeamProceedings paper978-1-7281-5891-4WOS:000612237500148TEMPERATURE