Nanometer scale characterization of ULSI devices using scanning probes

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenClarysse, TrudoTrudoClarysseDuhayon, NatasjaNatasjaDuhayonXu, MingweiMingweiXuHantschel, ThomasThomasHantschel2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4883Nanometer scale characterization of ULSI devices using scanning probesOral presentation