Chen, Chun-ChoChun-ChoChenWang, QingfengQingfengWangJonckx, FrankyFrankyJonckxJenq, Jyh-ShyangJyh-ShyangJenqMaex, KarenKarenMaex2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1115Ti-salicide improvement by preamorphization for ULSI applicationsProceedings paper