Laricchiuta, GraziaGraziaLaricchiutaVandervorst, WilfriedWilfriedVandervorstVickridge, IanIanVickridgeMayer, MatejMatejMayerMeersschaut, JohanJohanMeersschaut2021-10-272021-10-2720190734-2101https://imec-publications.be/handle/20.500.12860/33374Rutherford backscattering spectrometry analysis of InGaAs nanostructuresJournal articlehttps://doi.org/10.1116/1.5079520