Selective area MOVPE growth of GaAs-based III-V material on 300mm silicon for electronic and photonic applications

Guo, WeimingWeimingGuoMols, YvesYvesMolsLanger, RobertRobertLangerBarla, KathyKathyBarlaCaymax, MattyMattyCaymaxKunert, BernardetteBernardetteKunertDate, LucienLucienDateBao, XinyuXinyuBaoCarlson, DavidDavidCarlsonSanchez, ErrolErrolSanchez2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25347Selective area MOVPE growth of GaAs-based III-V material on 300mm silicon for electronic and photonic applicationsMeeting abstract