Dombrowski, KaiKaiDombrowskiDietrich, B.B.DietrichDe Wolf, IngridIngridDe WolfRooyackers, RitaRitaRooyackersBadenes, GonçalGonçalBadenes2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3426Investigation of stress in STI using UV-Raman spectroscopyProceedings paper