Development and reference-free characterization of 3D nanostructures as potential calibration sample for analytical techniques

Dialameh, MasoudMasoudDialamehFerrarese Lupi, FedericoFedericoFerrarese LupiDe Leo, NatasciaNatasciaDe LeoBoarino, LucaLucaBoarinoHönicke, PhilippPhilippHönickeKayser, YvesYvesKayserBeckhoff, BurkhardBurkhardBeckhoffWeimann, ThomasThomasWeimannFleischmann, ClaudiaClaudiaFleischmannVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28249Development and reference-free characterization of 3D nanostructures as potential calibration sample for analytical techniquesOral presentationhttp://www.european-mrs.com/altech-2017-analytical-techniques-precise-characterization-nano-materials-emrs