Ouyang, BolingBolingOuyangLi, YanLuYanLuLiKruidhof, MartenMartenKruidhofHorsten, RolandRolandHorstenvan Dongen, Koen W.A.Koen W.A.van DongenCaro, JacobJacobCaro2021-10-272021-10-2720190146-9592https://imec-publications.be/handle/20.500.12860/33715On-chip silicon mach-zehnder interferometer sensor for ultrasound detectionJournal articlehttps://doi.org/10.1364/OL.44.001928