Characterization of self-heating in high-mobility Ge FinFET pMOS devices

Bury, ErikErikBuryKaczer, BenBenKaczerMitard, JeromeJeromeMitardCollaert, NadineNadineCollaertKhatami, N.S.N.S.KhatamiAksamija, ZlatanZlatanAksamijaVasileska, DragicaDragicaVasileskaRaleva, KaterinaKaterinaRalevaWitters, LiesbethLiesbethWittersHellings, GeertGeertHellingsLinten, DimitriDimitriLintenGroeseneken, GuidoGuidoGroesenekenThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25029Characterization of self-heating in high-mobility Ge FinFET pMOS devicesProceedings paper