Makhotkin, IgorIgorMakhotkinWu, MeiyiMeiyiWuPhilipsen, VickyVickyPhilipsenSoltwisch, VictorVictorSoltwischScholze, FrankFrankScholze2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33515The refined EUVL mask modelProceedings paper