Lorusso, GianGianLorussoHermans, JanJanHermansBaudemprez, BartBartBaudemprezHendrickx, EricEricHendrickxKlostermann, Ulrich K.Ulrich K.KlostermannJang, StephenStephenJangZavyalova, LenaLenaZavyalovaSorensen, JacobJacobSorensenGao, WeiminWeiminGaoLucas, KevinKevinLucas2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15752Accurate models for EUV simulation and their use for design correctionProceedings paper