Leray, PhilippePhilippeLerayDusa, MirceaMirceaDusaLariviere, StephaneStephaneLariviereRoy, SyamashreeSyamashreeRoyBlanco, VictorVictorBlancoVerstraete, LanderLanderVerstraeteGupta, MihirMihirGuptaPoovanna, Bhavishya ChowriraBhavishya ChowriraPoovannaKim, Ryoung-HanRyoung-HanKimSuh, HyoSeonHyoSeonSuhHalder, SandipSandipHalderLiu, Ru-GunRu-GunLiu2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200002https://imec-publications.be/handle/20.500.12860/45973NA0.33 EUV extension for HVM: Testing single patterning limitsProceedings paper10.1117/12.3052244978-1-5106-8635-9WOS:001517286200002