Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection

Toledano-Luque, M.M.Toledano-LuquePantisano, LuigiLuigiPantisanoDegraeve, RobinRobinDegraeveZahid, MohammedMohammedZahidFerain, IsabelleIsabelleFerainSan Andres Serrano, EnriqueEnriqueSan Andres SerranoGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12979Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injectionJournal article